Research On Induction Heating Device Of MOCVD Reaction Chamber

Metal organic chemical vapor deposition(English abbreviated MOCVD) is an important technology for preparation of semiconductor devices or components. It has become the most widely used thin film technology for semiconductor lighting material preparation. The reaction chamber is the key and difficulty of manufacturing MOCVD devices, whose design directly determines the final quality of semiconductor thin films. And the growth thickness of semiconductor materials is closely related to the temperature distribution of the reaction chamber; therefore, the optimization design of the heating system is very important.In this paper, aiming at the MOCVD device by independent research and development, in order to reduce the manufacturing cost of the heating device in the reaction chamber, we put forward a kind of intermediate frequency induction heating system which is safety and low price to replace the DC resistance furnace heater which is more expensive.According to the principle of induction heating and the characteristics of MOCVD device using induction heating system, the 3D model of the reaction chamber is established in the ANSYS environment.The simulation analysis focusing on studying the temperature field distribution of the graphite base in the reaction chamber surface is applied through the finite element method for the electromagnetic-temperature coupling field of the simplified 2D model.The paper studied the effect by current intensity or current frequency on the magnetic field distribution, the Joule heat distribution and temperature field distribution in the base. The analysis found that the heating efficiency is proportional to the electrical parameters and the temperature uniformity is inversely proportional to them.The paper also studied the influence of structure parameters on the induction heating, found the relationship between the coil turns, coil thickness, coil shape, relative position of coil, and graphite thickness with the magnetic field, temperature field results, and then found relevant experience data According to the relationships.Using the Conclusion and empirical data of those analyses above, the structure of the induction heater is optimized, and the sensor prototype is designed and fabricated. A uniform temperature field is verified by experiments, which basically meets the temperature requirement of MOCVD devices.