Design And Analysis A 3-DOF Compliant Parallel Micro-Manipulation Stage

Micro/nano manipulation is a comprehensive technology, which covers precision engineering, control engineering and computer science, furthermore, design and analysis the micro-stage is the fundamental of the micro/nano manipulation technology. Recently, micro/nano technology has became a hot issue, many kinds of micro stage has been designed, what’s more, many of them has made a difference in micro-assemble engineering, bio-engineering field.This paper proposed a 3-DOF compliant parallel mechanism with large workspace, ie, translation along X/Y direction and rotation around Z a xis, this design has a compactness structure and more larger workspace. In this paper, we introduce the design process at first, then has kinematic analysis and derived the Jacobian matrix based on position level.What’s more, we have a workspace analysis based on MATLAB/Sim Mechanics toolbox, which is a new method to analysis the workspace of compliant parallel mechanism. Based on PRB method, first, we build the flexure hinges model,and then, the whole mechanism was build by Sim Mechanics blocks. The Maxwell-Slip model was adopted to get the relationship between the input displacement and output force, then the workspace was derived, we also use the iteration method to validate our simulation results.