The Performance Test And Research Of Intelligent Parallel Micromanipulator System

The development of intelligent micromanipulator is becoming increasingly tiny and integrating, and accordingly the micromanipulators for assembling those components are required to have higher resolution and precision. Conventional serial micromanipulators that have long open kinematics chains are not suitable for precise manipulation in microscopic scale because of their deficiencies of low stiffness and articulation error accumulation. On the contrary, in-parallel actuated micromanipulators have the advantages of more rigidity and accuracy, higher load capacity, and simple inverse kinematics, therefore they can be used to replace conventional serial ones to meet the rising need for higher precision, they are widely used in automation, communication, mechanics engineering, medicine field and so on. So the performance test and research of intelligent parallel micromanipulator is very important and significant. In this dissertation, based on the 3-freedom type intelligent parallel micromanipulator, the position and direction of the mechanism actuator is defined. The workspace is discussed according to the analysis of the motion. As the microscope of this mechanism, we put forward a practical method of the structure error analysis and computing. In this dissertation, both single and complex driver-magnifier as a whole body is tested and studied by the tool of ANSYS for the deep analysis of kinemics, workspace, error analysis and compensation. And the method of helix-mechanism is induced to study the model accurately. At last the automatically writing of the actuator is put into used in the prospect of micro moving .