Analysis And Design Research Of A Kind Of New Type 3-DOF Parallel Micromanipulator

With the development of science and technology, more and more people are paying attention on micromanipulator. As micromanipulator has wildly application filed, it is very important to design and analyze a new type of micromanipulator which can satisfy given request.In this paper, 3-DOF parallel micromanipulator driven by piezoelectric actuators is designed based on the 3-5R parallel mechanism. As the study basis of the micromanipulator the kinematics of the micromanipulator is analyzed firstly and the characteristic of the micromanipulator is taken into a full consideration. Through proper abstraction the position of the mechanism is solved with D-H approach. The first-order influence coefficient matrix of the micromanipulator which reflects the characteristic of the movement transmission is introduced, and such a matrix is constant. Taken a further research, then velocity analysis is given.As the integral stiffness of micromanipulator influences its dynamic characteristic and precision of location, the matrix of stiffness of 3-5R parallel micromanipulator is obtained by used compliance matrix. The relation between stiffness performance and preliminary parameters of the mechanism is given, and the conclusion may act as the guide of optimizing the preliminary parameters of the micromanipulator.The dimension of the platform and flexure hinges and the position of flexure are designed. The selection of materials and machining is given. The safety check of the flexible hinges and the designed mechanism is done with the aid of finite element modeling to provide good stiffness with little bending deformation of the platform.Finally, the controller of the micromanipulator is given. SCM is used to control. The component parts of the controller are given. Hardware and part of soft ware of the controller are designed.