Less Degree Of Freedom Micromanipulator Institutional Analysis And Motion Simulation

In precision engineering field such as precision machining, biomedicine andmicroelectronics, the demands for precision movement are increasing, which lead tothe development of a new application field i.e. micromanipulation. Parallel-actuatedmicromanipulator possesses such advantages as good rigidity and accuracy, high loadcapacity, and simple inverse kinematics; therefore they can be used to meet the risingdemand for higher precision movement. A 4-DOF parallel micromanipulator isstudied deeply and systematically in this thesis.As study basis of micromanipulators, kinematics is analyzed first. According tocharacteristics of micro-motion, direct and inverse kinematics equations areformulated using differential transformation, and jacobian matrix of the input/outputdisplacement is derived, which can be considered a constant matrix over entire rangeof minute motion. Direct and inverse velocity equation and acceleration equation arealso obtained explicitly. Above research work provides theory foundations forkinematics characteristic analysis of the micromanipulator.As the workspace of micromanipulators is minute, the structural errors andactuator errors lead weak accuracy , which is a key performance target ofhigh-precision-oriented micromanipulators. Static mechanics analysis of themicromanipulator is done based on above work, while mapping relationship betweenthe end-effector's purturbative displacement of position and orientation and the microdeformation of the flexure joints is derived. Static stiffness model is established basedon virtual work principle. Research results show that both transmission stiffness andthe flexible joint stiffness influence static stiffness. The conclusions can be used toguide the optimal structure design.On the basis of the analysis of static stiffness, the error sources are analyzed fully,and two methods of error modeling are discussed--one is vector analysis method, theother is generalized geometric method. Then the general equation between errorsources and errors of displacement of position and orientation is established. An...