A Study On The Key Technology Of Decoupled Kinematics 6-DOF Parallel Micromanipulator

In precision engineering field such as precision machining,physic and microelectronics the demands for the multiple degree-of-freedom fine and precision movement is increasing,Which lead to the development of a new application field i.e. micromanipulation. A more allout study on a novel structure of the micromanipulator has been carried out based on a 6-DOF parallel micromanipulator with decoupled structure in this article.As the study basis of the micromanipulator the kinematics of the micromanipulator is analyzed firstly and the characteristic of the micromanipulator is taken into a full consideration.Through proper abstraction and simplication the Jacobian matrix is introduced which reflects the characteristic of the movement transmission,and such a matrix is constant. Take an further research,then a key conclusion that the kinematics of the micromanipulator is decoupled can be drawn out. Such a feature could simplify the workload of the control system greatly,and it shall be much superior to those models which exist nowadays.The micromanipulator must contact the objects to be handled in the manipulation process and the end-effector will be loaded by the exterior forces.The static mechanics of the manipulator has been analyzed on the basis of the work done above,by the way of the screw theory the mechanics Jacobia is educed,furthmore,the matrix is the transpose of the kinematics jacobia in such a microscopic world.Meanwhile the index of the static stiffness and payload related to the mechanics is studied.As the micromanipulator realize its trasmission of the movements and mechanics by the elastic distortions of the elastic objects,so the performances of the elastic joints have an impact on the realization of the movements and the accuracy.Thus the structure and the parameter design of the elastic joints is discussed together with the actuation,payload and fabrication,etc.For the high-precision-oriented manipulator the accuracy is the crucial performances target.So the error sources is given a full consideration from theperformances target.So the error sources is given a full consideration from the geometric errors,and combined with the characteristic of the micromanipultor the error model which can represent the accuracy of the micromanipulator,then the accuracy index is difmed and the relations between the errors and the mechanism parameters have been given by numerical software and the conclusion drawn out may act as the guide of the development of the trial prototype of the micromanipulator.The micromanipulator studied is an elastic body decoupled with mechanics and displacement.In order to validate the Tightness and the practical controling effect, a simulation on the model established has been performed using FEA software, and within a certan accuracy scope the decoupled effect can be drawn from the model.