Research And Implementation Of Control Method Of Nikon Scanner’s Synchronization Accuracy

As Moore’s law continues, the integration of a chip is higher and higher, the number of transistors per unit also more and more, the line width decreases, this requires lithography tool’s resolution and overlay accuracy become higher and higher. In order to meet these requirements, lithography tool manufacturing factory’s production is also from stepper to the scanner, and then to the immersion lithography tool which is currently the mainstream production of the market, and also the resolution goes from the micron of the beginning to the nanometer level, the overlay accuracy from a few microns to the latest2.5nm overlay of lithography tool. At the same time, because of the continuous improvement of the accuracy, lithography tool requires high accuracy movement of each internal component, so synchronization accuracy was developed to evaluate accuracy of each component’s movement of lithography tool, and related theories and evaluation methods are widely stadied. Therefore, the synchronization accuracy evaluation of Nikon NSR-S204tool was studied and its control methods are discussed.Firstly, the scan exposure system, coordinate system, dynamic exposure method, and the basic principle of synchronous control are presented in this thesis, and base on the above technique, synchronization concept and evaluation method were further analysed. These theories and methods for Nikon NSR-S204scanning tool, collect and analysis of key parameters of the tool error value, mean value, MSD, FFT etc, to achieve a rapid assessment of the accuracy of synchronization accury. Further, to appear in the project earlier accuracy assessment of unqualified, combined with equipment failure phenomenon, crawl through the data analysis problem, gradually troubleshooting problems, and then find the source of the problem liesand then found the root cause, through comparison, found that all the NSR-S204tools have the same problem, finally make the modification plan and carry out. The trace data and the actual situation after modification shows that this is a very successful modification, eliminate fundamentally similar synchronization accuracy problems happen again, reduce downtime, bring many benefits to customers.