Design And Study On Ultrasonic Dry Cleaning Machine Mechanical System

In recent years,China’s flat panel display industry continues to maintain growth，thedevelopment of flat panel display industry led to its development required for the productionof raw materials, glass substrate is one of the key basic material of the flat panel displayindustry, which is a fundamental part of flat panel display. Ensuring the glass substratecleaning is essential, ultrasonic dry cleaning machine is indispensable.The ultrasonic dry cleaning machine，in this paper, as the research object. Firstly, thepaper analyzes the principle of the ultrasonic cleaning glass substrates. Then, on the basis ofthe theory of mechanical design, the paper designs and optimizes the mechanical system ofthe cleaning machine through using SolidWorks, ANSYS software. Finally, the cleaningmachine is produced and the cleaning effect of the cleaning machine is tested. Specificstudies and conclusions are as following:(1) The paper analyzes the cleaning principle of ultrasonic dry cleaning machine. Firstly,it elaborates the reason of solid surface particle attachment, and analyzes the forces ofattached particles, and establishes mechanical model. Ultrasonic cleaning head includes anultrasonic chamber and a vacuum chamber. The ultrasonic chamber issued ultrasonic toovercome adhesion of dust particles, so dust particles are divorced from the glass substratesurface through moving up, rolling and sliding in three ways. Then, the dusts are sucked bythe vacuum chamber. Finally, it achieves the purpose of cleaning.(2) The paper designs mechanical system of cleaning machine. Firstly, according to thefunctions of the cleaning machine, the overall scheme is designed. Then, the mechanicalsystem is designed in detail from the power system, transmission system, execution systemand supporting system. The servo motor is chosen as the power source in the power system.The paper analyzes and checks the choice motor. The transmission system chooses the toothshaped synchronous belt drive mode. The paper selects and calculates the synchronous belt and pulley. The execution system designs support glass structure, the motion of the board isdetermined. According to the design requirements of the whole mechanical system, the frameof the support system is designed a reasonable structure.(3) The key parts of the mechanical system is analyzed and calculated through usingthe ANSYS finite element analysis software. The paper mainly analyzes and researches thestrength and stiffness of the mechanical structure of the parts. The results show that themechanism of all parts can meet the design requirements. To satisfy the deformationrequirement of glass substrate, the paper also analyzes the glass support structure by finiteelement. The results show that the supported glass substrate fully meets the requirements ofglass deformation which is not more than5mm.(4) The objective of optimization is the quality. The structural size of the framework ofthe cleaning machine is optimized using Design Explorer module in Workbench. Theoptimization results show that under the premise of meeting stiffness and strength, the qualityis reduced by23%when wall thickness of choosing the square section steel is4mm. So, thematerial and the cost are saved. At the end of the paper, the prototype of the cleaning machineis produced. And the cleaning effect is tested. The results show that the designed ultrasonicdry cleaning machine can meet the process requirements.