The Design And Research Of MEMS Gyroscope Based On The Mesoscopic Calender Effect

Micromechanical gyroscope has a wide range of applications and plays an important rolein the areas of consumer electronics, modern industrial control, aerospace, defense and military.However, it is difficult to further improve the detection accuracy of the micro-gyroscope due tothe limitations of the existing sensing principle. So it is urgent to launch a new effect sensingprinciple-based micro-gyroscope technology. Mesoscopic calender effect mainly refers to thepropagation characteristics of photons in photonic crystals. Weak mechanical signal will causethe resonant tunneling peak of the photonic crystal quantum well change significantly. Owingto the equality of photon velocity and the speed of light, its rest mass is zero, there is nointeraction and the photonic crystal can control the motion of photons. Using the mesoscopiccalender effect of photonic crystals can overcome the shortcomings of existing detectionprinciple, and also can improve the detection sensitivity of MEMS gyroscope fundamentally.In this paper, the theoretical basis of MEMS gyroscopes and pressure mesoscopic photoniccrystal optical effects were discussed. Application of the transfer matrix method, the opticalproperties of mirror three periodic one-dimensional photonic crystals are analyzed, themesoscopic calender coefficient of the photonic crystal was given, and its implementation inmicro-gyroscope was demonstrated.A novel electrostatic comb drive gyroscope based on mesoscopic calender effect wasproposed, as well as its working principle. Based on the basic principles of mechanics ofmaterials, the structural parameters of micro-gyroscope were calculated, and the micro-gyroscope structure parameters are optimized by finite element methods. Dynamiccharacteristics, sensitivity characteristics and damping characteristics of the micro-gyroscopewere simulated and analyzed, which demonstrates the rationality of the proposed design. Themicro-gyroscope has good frequency matching, achieve a better work modal decoupling, andcan ensure a highly sensitive detection of the weak Coriolis force. Its transmittance sensitivity can reach73μ/°/s.Based on the structural characteristics of the micro-gyroscope, early accumulatedfabrication experience, the fabrication process of the mesoscopic calender-type siliconmicromechanical gyroscope were studied by using bulk silicon technology and embeddedtechnology. The process and structure layout of the micro-gyroscope were studied and thefeasibility of the design process was verified by using CoventorWare software.