The Design And Fabrication Technology Of The2D Photonic Crystals Waveguide Devices Based Silicon

1987E. Yablonovich, and S. John independently proposed the concept of"photonic crystal"(PC). Photonic crystals are periodically arranged by the differentdielectric constants of the material in the space formed by the artificialmicro-structure. PC decives based on photonic crystal photonic band gap and photonlocalization properties have the following advantages: small size, high performancefeatures, will have important applications in future large-scale integrated optics aswell as all-optical network.In this paper, two-dimensional photonic crystal waveguide devices in futurelarge-scale integrated optics and optical network were investigated, and the followingnovel progress were gained:1. A kind of axially filling-factor graded2D triangular lattice air holes photoniccrystals. Simulation results show that in range of normalized wavelength（λ/a）1.43-2.71，3.41-4.00, the horizontal incident light are deflected to the bottom ofphotonic crystals as well as the small filling rate part. The sample has the function ofsplitting light. And axially filling-factor graded2D triangular lattice air holes photoniccrystals are prepared on p-Si (100) wafers by electrochemical etching and MEMStechnique.2. A novel variable optical attenuator (VOA) based on the photonic crystal (PC) cavitywith liquid crystals is demonstrated. The point defect of photonic crystal cavity isfilled with phenylacetylene liquid cyrstals. The output of optical attenuator iscontrolled by adjusting rotation angle of the liquid cyrstals orientation vector. The attenuator performs output of3.40%-99.58%at the wavelength of1.55μm.3. A novel photonic crystal (PC) all-optical switch based on the shift of defect mode isdemonstrated. The point defect of the photonic crystal cavity is filled withphenylacetylene liquid cyrstals intermingle with azobenzene. The output of the opticalswitch is controlled by adjusting rotation angle of the liquid cyrstals orientation vector.The optical switch based on the PC cavity can be changed by adjusting the appliedLinearly polarized light. The results show that the switch has low threshold powerdensity, great extinction ratio, and small size.4. Combine metal catalyzed chemical etching method which fabricate disorderednanostructures and MEMS technology to prepare orderly2dimensional photoniccrystal.5. Large area aligned identical silicon nanowires array were prepared onmono-crystalline Si N(100) wafers. The reflection spectrums show that the obtainedSiNW arrays could drastically suppress the optical reflection over a wide spectralbandwidth ranging from300to1000nm, the reflectance is about2.4%. Themechanism of antireflectivity and difference among the samples are analyzed.