The Research Of Suspend Controlling Electrostatic Suspended Micro Gyroscope

Recently, with the extensive application of electronic mechanical technology to micro mechanism gyroscope, micro levitated rotor gyroscope has been well studied and explored. Micro levitated rotor gyroscope takes the advantage of gyro effect of high speed rotor to measure angular speed of a carrier, as well as linear acceleration. The angular speed and linear acceleration of a carrier is translated into the change in capacitance through differential capacitance structure, and is further translated into the output of electrical signals. The measurement of gyro's angular speed and linear acceleration turns out to be the measurement of relevant differential capacitance. In line with the characteristics of the differential capacitance structure of micro levitated rotor gyroscope, the thesis probes into two methods for testing and controlling: applications of DSP and NI virtual instrument respectively so as to reach the purpose of controlling the suspension of the Gyro.The major research items and results are as follows:First of all, the introduction of the capacitance structure and working principles and dynamic equation of micro levitated rotor gyroscope, and the analysis of the change of gyro's motion state under antihunt effect. And the discussion of the application of digital signal processing technology for the purpose of testing and controlling micro levitated rotor gyroscope.Second, the signal testing method is introduced, including I-V conventioon, pre-amplification, filtering circuit, A/D converting circuit and the gyro signal testing system with the use of digital signal processor or NI virtual intrument . The electro static model is set up for the realization of stable suspension of the rotor. During the process of setting up the model, the principles of static electricity are analyzed and the calculating formula is worked out. Matlab Simulink is applied to the analysis of the small and large displacement of the system. This shows the adjustable parameter of the system while using PID controller.Finally, the controller is designed, based on the result produced by simulation. Two steps are introduced here: 1) C programming language is used to program the PWM module of TMS320F28335 board, so as to get the output of oscillating wave to overcome the damping during the suspension of the rotor; 2) Labview is used, and the PID module is directly applied, together with the application of NI PXI series of hardware devices,running hardware in-loop simulation,to reach the purpose of controlling the suspension of the rotor.