The High Precise Wafer Stepper On The Basis Of C/S Frame

Semiconductor Manufacture is a new developing technology. Wafer Stepper is one of the key equipments for large scale integration parts producing. It' s main duty is to solve increasing demand for high resolving power, high overlapping accuracy and efficient performance. Among them the motion position accuracy of the exposition worktable is determinable for thickness of the graphic lines and the degree of the overlapping accuracy which is most important for semiconductor manufacture. Nowadays, whether inboard or outboard companies have both developed the computer assistant graphic equipment and optical graphic originating equipment for make shadow mask panels. On the basis all of these, a kind of high performance and high precision wafer stepper control system was researched and have been realized with the technology of advanced open motion control and C/S structure network.The main work can be describe as follows:1. Do research on semiconductor process technology, analyze it' s theory and flow.2. Do research on technology of open motion control system, establish the 2-axis motion control system which is controlled by PC and DSP.3. Do research on remote control and video transportation with TCP/UDP network protocol.4. Develop the wafer stepper software with C/S structure, to reach the aim of high performance.5. Experiments are done to testify that the system meets the requirement , and also show the good stability.