Study On MEMS Sensor And Applications Of Fuze

Micro Electromechanical Systems (MEMS) will provide new technical support , which the other technology can not provide. The paper can be divided into two parts: the design, manufacture and test of the silicon micro-machined acceleration sensors and the circumstances - identify of the fuze which is based on the silicon micromachined acceleration sensors.At first, the production of the research on the silicon micromachined acceleration sensors is analyzed home and abroad. The simple - structure, facility - process and low - cost piezoresistive accelerometers are used in the fuze to feel the circumstances of launch, which is under the request of the detection of the circumstances of the fuze. The structure and the process of the sensors are designed according to the preferences. The samplers of the sensors are produced successfully. The samplers are demarcated dynamic, and the results turn up trumps.The security and the reliability of the fuze are analyzed during the circumstances - identify which is based on the silicon micromachined acceleration sensors in this paper. The method, threshold - time - gate is put forward which is used to identify the circumstances of launch, which is based on this kind of sensor. The paper points out that the design of the safety and arming system (S&A) of the fuze will translate from structure design to software of the circumstance - identify design. At last, the paper points out that the developments of the MEMS will change the design of the fuze on three levels. Component level which can be used to machining solid-state S&A, production level which will result in the developments of the solid - state fuze, system level which will realize the integration of the control, guide and the fuze.