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Keyword [UV-LIGA]
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1. Study On Topology Design And The Related Problem Of Electrthermal Microgripper
2. Research On Tooth Profile Design Method Of Micro-gear
3. The Design And Fabrication Of Compliant Electrothermal Microgripper
4. Study On The Internal Stress And Thermal Swelling Of SU-8 Photoresist In UV-LIGA Process
5. Research On Key Technologies Of Electrothermally Actuated Compliant Microgripper
6. The Fabrication Of MEMS Fuze Safety Device And The Study On Bonding Strength Of Electroforming Layer
7. Based On The Fuse Explosion-proof Structural Design Of Mems Technology And Technology Research
8. Research On Detection And Control System Of Capacitive Micro-accelerometer With Round Proof Mass Supported By Multi-Beam
9. Research On Piezoelectric Energy Harvester Based On MEMS Technology
10. Micro Gold Parts Fabricated By UV-LIGA
11. Study Of Gratings Fabricated By UV-LIGA Technique
12. Research On Design And Processing Methods Of MEMS Micro Actuators Used In Fuzes
13. Research On Processing Technique Of MEMS Omnidirectional Inertial Switch
14. Fabrication Process Of Metal Micro-grating And Metal Micro-column Array Structure
15. Design And Fabrication Of A Low-g MEMS Inertial Switch With Novel Radial Electrode
16. Study On The Microchannel Heat Sink Of Metal Ceramic Composite Structure To Enhance Heat Dissipation
17. Design,Fabrication And Characterization Of A Low-g Passive Inertial Switch With Low-stiffness Fixed Electrode
18. Fabrication Of Microneedle Array Based On Micro-fabrication Technology
19. UV-LIGA micro-fabrication of inertia type electrostatic transducers and their application
20. Design and fabrication of electromagnetic micro-relays using the UV-LIGA technique
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