Mems Fuze Safety System Of Micro-drive

As an impotant part of a system, microactuators have been paid increasing attentions from scholars all over the world. In this dissertation, the microactuator which is used in the Safety and Arming device (S&A) was investigated theoretically and experimentally, wherein the S&A is a planar structure fabricated based on the MEMS technology and the barrier has a dimension of 25mm×25mm×2mm. To the end, the driving system should satisfy the requirements of the fuze service, which are small volume, large force, long stroke as well as non-contactable. A microactuator driven by electromagnetic force can solve these problems and thereby was adapted in the design. The main contents and innovative points include:(1) A state-of-the-art review on the applications and tendency of MEMS technology for fuze system was explored and the principle of driving system in MEMS was investigated.(2) Looking into the S&A, several kinds of microactuators used in the S&A were summarized. Considering the S&A device's requirements, a disk-type micro-driving prototype using electromagnet was chosen based on the researches on the S&A devices.(3)Using the electromagnetics and heat transfer theory the main parameter has been estimated and optimized by MATLAB software. Three electromagnet products are calculated and estimated to find out the force that can supply.(4)The electro-magnetic field has been analyzed by the powerful ANSYS software. The microactuator models has been built from 2-D to 3-D, since 2-D modei can be simplified built and is capable of explaining some principles, and the 3-D complex model must be built so as to finalize the accurate results. After the theoretical analysis, the structure of the microactuator has been optimized by the APDL tool.(5)The material of the microactuator has been introduced and concluded in detail, and the whole experiment platform was also completed in order to testify several kinds of electromagnet drives. The test results showed the coherence with theoretical analysis.To be concluded, summarizations of this dissertation were made. The innovations and the following work need to be completed were also introduced in detail. The work deals with the specific structure and the theory will be tested by practice.