Temperature Monitor System And Uniformity Research Of MOCVD

As one of the key techniques of LED industry, developing MOCVD device plays a prominent role in the development of this industry. It is necessary to develop our own MOCVD device as our country puts emphasis on LED industry. This research was being undertaken based on a practical MOCVD development.MOCVD development is a complicated work including mechanics, process, software development and control system. But my research only covers the last two parts and focuses on three problems. The first one is to design the software architecture for control system of MOCVD. We made it after analyzing requirements and comparing some popular used software. We design our architecture and inner modules according to the split-level design and modularity strategies, middle wares based on CORBA/PRC is used to exchange data between different levels. The second job is to define the interface for temperature control. We let the PC do the computation job of PID parameters, design the communication interface between PC and controllers which allows more than one communication protocols to be available, we also give out the uniform interface for control algorithms to make it possible to use intelligent control algorithms. An application is also developed to test the DLL The last job is to propose a temperature uniformity control strategy based on online modeling and bionic optimization algorithms. By using network to get the model of MOCVD online for controlling, and compute the optimal power ratio by using bionic algorithms with the built model. This control strategy will provide a new way for temperature uniformity research and has been proven valid by simulation.Our research is closely related to real engineering work, and the results we got can be used to instruct the development of MOCVD device. Actually, several parts of our achievements have been applied to real engineering and get satisfactory results.