Research On The Temperature Control System Of MOCVD

MOCVD(Metal-organicChemicalVaporDeposition), the hird generation of novel semi conductor GaN growth technique. There action temperature is the key factors of MOCVD system quality growth of epitaxial materials. The emphasis of this paper is to design a set of MOCVD equipment for the temperature control system,including the analysis of heater and heating power thermostat,heating system.This paper introduces the control scheme, MOCVD temperature control object, control etc. Secondly,this paper designed a temperature controller hardware, microcontroller PIC18F87J72chip as the core components, the PIC18F87J72chip is a kind of high performance with CAN module microcontroller, it can make the temperature control system to realize the automatic data acquisition, data processing, data conversion, keyboard and display control terminal processing function.In the stability, accuracy and easy realization degree has an overall improvement design was simple and cost as the starting point, try to choose high performance chip to save design cost. Thirdly, the software design of the temperature controller, including A/D module, D/A module subprogram, the other Interface subroutine, and preliminarily on the hard, software system debugging. This paper uses he PID control algorithm, this algorithm has PID controller in dynamic monitoring quality and steady precision, achieved fast ise time,overshoot small request,made a very good control.Finally, the existing heating of MOCVD system is studied, the heating power system requirements. And the simulation and testing on the temperature control system, the results show a good control effect...