Fabrication And Optical Properties Of InP-Based Gradient Index Structure

This dissertation, by combining binary optics, Multiple beams laser interference lithography and electrochemical etching technology, making full use of its own advantages, using classical electromagnetic field theory, on the basis of the dielectric constant and the index of refraction of the relationship, designs a kind of refraction in certain areas of gradient structure, and finds out a suitable for InP gradient index structure of the preparation of new technology, making the light with high convergence or divergence function of InP infrared device.This dissertation describes lithography processing technology and binary optics, infrared properties of InP material studied theoretically using photolithography and electrochemical etching of InP to control the refractive index of the program. The role of the wave surface, design based on a typical optical element light InP device having a converging, diverging, and other functions. Build multi-beams laser interferometer the interference pattern of the experimental system the engraved and electrochemical corrosion technology to produce InP function lens, using Matlab programming analog laser and direct writing exposure and electrochemical etching preparation of InP gradient the gradient structure function lens, its structural testing spectral characteristics.