Fabrication Of Periodic 2D Micro And Nano Optical Structure

The technology based on nano-imprint technology and reactive ion etching techniques makes the replication of high-precise, low-cost and high-yield micro- and nanostructure can be implemented simply and efficiently. But now, the replication of micro- and nanostructures based on nano-imprint technology still remains following problem: as the radio of the replication of nano-imprint technology is 1: 1, the template used for imprint should has sufficient accuracy, and currently, most people using direct-write electron beam processing, etc., which leads to the template processing costly and lower processing efficiency.Project ‘Preparation of periodic two-dimensional micro-nano optical structures’, which responses to the problem above and combines with nanoparticles’ self-assembly techniques, conducts on theoretical analysis and experimental study, trying to completes the preparation of periodic two-dimensional template of nano-imprint by the technology based on nanoparticles self-assembly, providing the technical basis for lower cost and more efficient nano-imprint technology.In this thesis, the main works are as follows:Firstly, study on the characteristics application status and the development of the current preparation of periodic two-dimensional micro-nano optical structure, which is typical in periodic medium micro- and nanostructures and periodic metal micro- and nanostructures. Besides, we proposed a method based on self-assembled nanoparticles prepared imprint template for the problem of current nanoimprint templates’ high production cost and low processing efficiency in this thesis.Secondly, nanoparticles’ self-assembly refers to the phenomena of nanoparticles’ fixed array when nanoparticles under the condition without outside guidance and manipulation. So, using nanoparticles’ self-assembled technology to prepare mask becomes a simple and efficient preparation process. This subject further analysis nanoparticles self-assembly process, discuss it’s characteristics of micro-nano machining, and further analysis many factors affecting their deposition when nanoparticles carry self-assembly, trying to provide theoretical guidance for preparation of nano-imprint templates based on nanoparticles self-assembled, combining the previous study of molecular self-assembly.Thirdly, complete self-assembly of nanoparticles and obtain periodic two-dimensional structure based on study of theoretical analysis and experimental guidance of nanoparticle self-assembly. Study the reactive ion etching technique, and complete the preparation of the imprint template after completing periodic two-dimensional structure of nanoparticles’ self-assembly.Fourthly, study on the nano-imprint technology, and take 1000 nm period two-dimensional grating with a line width of 500 nm as an example combined theory and experiment to analysis process parameters on imprinting process, mainly including the influence of thickness of coated imprint, stamping temperature, stamping temperature, stamping pressure, stamping time and exposure time on preparation of the grating. Replicate two templates based on optical micro- and nanostructure respectively. Finally, analyst surface topography and test other optical performance of the optical element prepared.