A novel underwater acoustic receiving transducers---micro-electro-mechanical-system (MEMS) vector hydrophone was designed and fabricated by means of the existing low cost MEMS Accelerometer, It is desirable that the application of this kind of MEMS Accelerometer and ingenious structure to vector hydrophone may improve the low-frequency sensitivity and its miniaturization. The hydrophone can be communicated and completed data-transform or process with computer by the microprocessor, fabricated and encapsulated by MEMS technology, and measured both by vibration-platform and underwater standing wave field. This kind of MEMS Accelerometer has many function, combing with the low cast compass, it can apply in the perception of the underwater acoustic receiving transducers or the underwater acoustic system.Based on the study of MEMS accelerometer design of acoustic contact sensor system, according to the need to develop a system design index. It focuses on the system hardware design and data acquisition and processing software, a detailed description of the LOFAR digital signal processing and graphics display, sensor design, debug and test chamber sphere tank experiment design steps. Design is a long-term process, on the basis of the above work, combined with the subject, for future work is discussed, such as standard measurement, improved signal processing method and the selection of more high sensitivity accelerometer MEMS system design. |