Mems-based Rf Front-end Subsystem Research

In recent years,Micro-electro-mechanical System(MEMS) has been developed drastically.MEMS technology applied in radio frequency communication field,which is known as RF-MEMS(Radio Frequency Micro-electro-mechanical System),has great potentials. RF-MEMS research has become very important in application of Rdio frequency,and drawn attention of academe and governments greatly. MEMS technology applied in radio frequency communication field, a great of passive devices which could not be integrated,such as atennas, switches, filters, inductors, capacitors, and so on,have had new technique to realize integration and have been excellent quality,so system on-chip(SOC) will come true.The RF MEMS devices research in overseas and inland have had some development and achivement.But,the research of RF-MEMS front-end system ,have not any relate reports.So,being supported by the task(the research of micro-scale RF devices) of nation′s"973 Plans",this article has studied the RF MEMS front-end system,discussed some basic questions for the latter SOC.The main contents of the thesis are shown as follow:Stating the principle of the customary communication system on receive and transmittance front-end module,analysis on the structure, elements and various parameters of the module.This is the theoretical prepared for the next Demo system.Because RF MEMS devices is the base of the MEMS front-end module,the device parameters have significant contributions to the performance of the final products in which the devices are used.So,we must know the design and process techenology of the RF devices.To construct and analysis the TTD Demo module,the MEMS devices substitute for the former electric devices,then succeed to obtain the RF MEMS front-end R/T system which can communicate with each other.Finally,we bring forword the next development of the RF MEMS front-end system. From the research of the RF MEMS devices and module,we can assure that the RF MEMS system has an extremely promising future and will be in application rapidly.