Research On MEMS Piezoresistive Accelerometor

This paper discussed the process of Micro-electro mechanical system. The research of piezoresistive accelerometer was introduced, the priciple and properties of accelerometer were presented. The design,fabrication process,package and test of the device were done.A super-stable structure with quad-beams,which has highly symmetric structure has been designed ,and this help to eliminate the errors caused by the change of the dimension and position of the piezoresistors in structure. Besides,sandwich structure is adopted in this device,the bumps are made on two caps to get high overload ability,and this structure made benefical to the high overload. We simulated structure of accelerometer based on finite analyse software. After the structure was decided, the software of Layout Edit were used to draw the layout of the device's structure. The problems met during the fabrication process were discussed, Some suggestions were presented to solve the problems. At last, packaged and tested the device, the package of accelerometer provided electric connection in and out of chip,machina supportion,circumstance protection.Test of accelerometer includes test method and. test results,and the results validated capability index of product.