Mems-based Micro-mechanical Filters

In recent years, Micro-electro-mechanical System (MEMS) has been developed drastically. MEMS technology applied in radio frequency communication field, which is known as RF-MEMS (Radio Frequency Micro-electro-mechanical System), has great potentials. RF-MEMS research has become very important in application of radio frequency, and drawn attention of academy and governments greatly. Microelectromechanical filter, one of the key devices in RF-MEMS, has small size, light weight, stable quality and other merits; it can be integrated with other circuit element.In this thesis, I summarized the present state of the MEMS technology overseas and domestic。The principle of deign and the structure of Microelectromechanical filter have also been introduced. At this time, the approximate mechanical model of devices has been put forward, which frequency is 70 MHZ, then we analyzed the Euler–Bernoulli equation, find that the frequency is determined by the resonator's density thickness and length; The free-free-beam,coupled beam,support beam,transducer have been designed; The model was simulated and modal analyzed on the CoventorWare and were consistent with the designed parameter. The silicon surface microfabrication process was developed and emphatically introduced several key surface microfabrication technologies, and was simulated by CoventorWare.The research of Microelectromechanical filter design theory,miniaturization,fabricate process, has benefits, and found theoretical and technical base for improvement of Microelectromechanical filter field theory in micro-scale and integrated fabrication.