Temperature Tunable Filters Based On Silicon Microring-resonator Researches

Optical waveguide resonator devices based on the planar integrated are widely used inoptical communications, optical interconnects, optical computing and optical informationtransmission, because of highly integrated, low-power, high-sensitivity characteristics. Theoptical filter as an important class of photonic devices plays an important role in terms ofhigh-speed optical network transmission, channel selection, gain spectrum equalization inoptical communication network. Therefore, research is essential to the optical filter. Thispaper depth discussion and researches silicon micro-ring resonator tunable filter expressly thecore component micro-ring resonator.In this paper, we were analyzed the SOI waveguide transmission mode, single modetransmission condition, the coupling principle and polycyclic cascade micro ring cavity of thelight field transmission characteristics and spectral response characteristics. And we alsoestablished the system of the performance of the micro-ring resonator filter completecharacterization. At the same time, the transmission principles of different structures ofmicro-ring resonator filters were analyzed from theoretical. According to the single-modetransmission conditions, the sizes of the optical waveguide were obtained from FDTD andRsoft simulation software. And the structural parameters of different types of micro-ringresonator filter were optimized in accordance with the theory and simulation results.The small size and high integration SOI waveguide polycyclic cascading resonator filterswere fabrication using the MEMS process, such as UV lithography, electron beam etching,ICP deep silicon etching, electron beam evaporation, and so on. Moreover, the polycycliccascade waveguide resonator filters were realized with the minimum waveguide line width of450nm, and the coupling gap100nm.Finally, the1storder,2ndorder and10thorder filters-3dB response bandwidth of thespectral were tested using vertically the grating coupler. Moreover, it was also validation and got the relationship between different number of cascaded micro-ring and resonancespectrum roll-off verticality from experimental. Two racetrack-shaped cascade resonatorfilters were fabricated and tested the transmission spectrum characteristics. Further,according to the thermo-optical effect and the thermal expansion effect, ten ring cascadedfilters was tested with the radius R=5μm at different temperatures. And measured by theabove-mentioned points of the linear fit, the sensitivity of130pm/℃is consistent with thetheoretical value110pm/℃. The tuner can greatly increase the adapt range and filterprecision.