Silicon Based Optical Micro-ring Resonator And Its Applications

In today's world,the development of information technology is explosive,and people's demand for information and the transmission rate are gradually increasing.However,the development of traditional circuit integration and electrical interconnection,once guided by Moore's Law,has encountered "bottleneck" due to physical limitations,and people are constantly seeking new solutions.Among the many new solutions,the silicon-based integrated photonics has outstanding advantages and is widely viewed.The so-called "silicon-based integrated photonics" is aimed at using silicon-based platforms to integrate optoelectronic devices with various functions to realize optical chip integration and on-chip optical interconnections.It has high-speed,low-loss,and COMS process compatibility and other advantages.In the field of silicon-based optoelectronics and integrated optics,optical microring resonator is a very important component and is widely used to construct various functional devices such as sensors,lasers,optical modulators,optical filters,optical switches,optical delay lines,all-optical logic gates,etc.The topic of this paper is silicon-based optical microring resonator and its applications.We have conducted in-depth theoretical analysis and experimental investigations around silicon-based micro-ring resonators.The detailed contents are summarized as follows:(1)Optical waveguide theory and numerical calculation methods are introduced and studied.The working principle,main performance index,theoretical model and design flow of the optical micro-ring resonator element are analyzed,which provides a theoretical basis for subsequent application work.(2)Based on the subwavelength grating waveguide,a subwavelength grating microring resonator structure whcih could generate a Fano resonace spectrum has been proposed and designed for the first time.The introduction of sub-wavelength grating waveguide structure can significantly enhance the interaction between light and matter,and the asymmetric Fano resonance is extremely sensitive to the changes of ambient refractive index.Therefore,when it is applied to the field of complex refractive index sensing,the sensing sensitivity of the real and imaginary parts are greatly improved.From the results of theoretical simulation analysis,we got a sensitivity of 366nm/RIU in real part,which is about 6 times more than previous work;we also got a sensitivity of about 9700/RIU in imaginary part,which is about 71 times more than previous work.(3)The fabricate process flow of silicon-based optical devices was introduced,and sub-wavelength grating micro-ring devices were fabricated experimentally.After completing the preparation of the device,we conducted a test of the sensing experiment.In the glucose solution sensing experiment,our test results showed that the sensitivity of real part is 363 nm/RIU,which is in good agreement with the theory;as for the sensing of imaginary part,the performance is consistent with the theoretical trend too.The experimental results validate the theoretical analysis.(4)Based on the slot waveguide structure,we have designed a silicon-based Erbium-doped polymer slot microring resonator.Firstly,a slot microring resonator is etched on an SOI chip,then an Erbium-doped polymer is spin-coated as an upper cladding and filled into the slot region.Based on this designed device and using the 1480 nm pump source,the lasering application in 1530 wavelength has been studied in theoretical and experimental.