Precision Motion Stages Oriented Development Of The Dynamic Analysis Tool

This research is sponsored by the National High Technology Research and DevelopmentProgram. A computer aided analysis tool with independent intellectual right for precisionmotion stage is designed to provide a platform for the design and simulation of the precisionmotion stage dynamics analysis in this thesis.In order to meet the demand of nanometer or even sub-nanometer scaled precision, lots ofdampers are applied in the precision motion stage to eliminate the influence motivated by thevibration and friction. Because of these elements added, the system produces a kind of jointthat is called virtual joint and lots of inner forces, which make it different from the usualmotion stage. But the conventional dynamics theory can also be applied to analysis theprecision motion stage. This thesis research contents are as follows:Firstly, the Cartesian method is applied to the dynamics modeling in this thesis.Meanwhile, the R/W method is used in calculating rigid bodies’ initial position and speedwhich guarantee the accuracy of initial value and make the solution smoothly, beyond that theR/W method also improve the software’s operability. Gaussian elimination method andAdams predicted fourth-order amendment forecasting-correction algorithm are used in thisthesis result in higher stability and precision.Secondly, object-oriented method was used to design the overall software architectureand specific module and coding, which provides a friendly environment for the follow-upexpansion and improve software’s robustness and codes’ portability.Thirdly, the software designed in this thesis is used to analysis two classicalconfigurations in precision mechatronic systems, the software’s accuracy and validation areproved by comparing the analysis result with ADAMS’s analysis result.