Research On Ensuring The Accuracy Of 3-RRR Parallel Micro-Motion Stage

In recent years, because of a number of advantages in planar 3-RRR parallel micro-motion stage, such as stiffness, load-bearing capacity, low error and high precision, it is increasing the research. In this paper, a 3-RRR parallel micro-motion stage will be researched on its kinematics, the system error analysis and control strategy when its theoretical analysis, the manufacture of stage as well as structural optimization have been researched.In this thesis, inverse and direct position analysis of the 3-RRR micro-motion stage is derived based on the pseudo-rigid-body model(PRBM). As a linear, effective kinematics model, constant-Jacobi methods are presented. The stiffness of the body is understood through the static analysis. Dynamics analysis of institutions are ready for the follow-up exercise control and ready to do optimization.The error model of micro-motion stage is discussed later, and the impact of the micro-stage on structure errors is analyze, an evaluation is given about the impact of the errors. The use of PZT ceramic hysteresis, creep characteristics of research results improve the driving accuracy.A reasonable experimental system control strategy is put forward and set up finally. Simulation of kinematics and control experiments of micro-motion stage are made by using matlab, so the micro-motion stage can be controlled easily.