Study On The Optical Processing Technique Of Large Size CaF₂Crystal

Along with the crystal growth technology getting more maturity and perfect, large size CaF2crystal, worked as one of the most excellent artificial crystals with comprehensive optical properties, makes more promising usage. Compared with that, its Ultra-smooth processing technology still remains dropping behind. This paper engages in researching the surface technology for Φ200mm CaF2crystal, especially the chemical mechanical polishing technology. Based on the CaF2crystal the material removal mechanism model, polishing technology has been researched systematically through a large number of experiments. Finally based on the above experimental researching, the best procession technical condition has been confirmed. Using the processing technique can get the ideal polishing result by checking the polish quality of the crystal sample.