Based On The Probe Tester For Electric Parameters Testing

With the rapid development of the integrated circuit, the requirement of measuring semiconductor devices’all kinds of parameters are getting higher and higher, among them the main measuring objects are voltage and resistance. Currently, the multi-probe method is widely used to measure parameters, while the traditional probe station measure objects with the disadvantages of lower efficiency and accuracy, and also measure less parameter. Thus, the development of a high-performance probe station is quite necessary.The thesis discusses the situation of both domestic and foreign semiconductor development. Based on the transformation probe station ST-103A, combination with microcomputer and human-computer interface technology, a new measurement system for measuring parameter is produced. The instrument’s main function is measuring SMT parameters (include voltage, resistance etc), this instrument have the advantage of easy operation higher efficiency and lower cost.In the part of auto-control, the probe platform in the X、Y and Z axis movement is controlled by stepping motor, it can be realized mobile automation. The X, Y stepping motor’s resolution can reach 0.0095mm and its moving speed can reach 1.9mm/s. In the part of video monitoring, the operator can observe the movement of probe station and measurement clearly through video monitoring system. In the part of measurement circuit, through voltage measurement circuit and resistance measurement circuit, SMD’s parameters can be accurate measured, the accuracy of measurement can reach 12 bits, the measure voltage range for voltage measurement circuit from-10V to 10V. By using serial-port the upper computer can communicate with microcomputer conveniently. Through the human-computer interface operator can control probe station and measure sample.In the dissertation, the reformed probe station can be used to test patch components’electrical parameters, and the lower computer is being added to video monitoring system and stepping motor control system. To make probe station improve its testing efficiency and reliability, programmer add man-machine interface to the upper computer. So, the efficiently solution for testing patch components emerges as the times require.