Simulation On Helicon Discharge Plasma With Dual Spiral Ntennas In Series

Helicon wave plasma driven by the resonance of the antenna and low-frequencywhistlers (helicon waves) in plasma and heated by noncollision Landau damping, whichhave an excellent capability of producing current-free, high-density plasmas up to1013cm3,is currently becoming an important plasma source. The magnetic flied applied inHWP is several hundred Gs. Recently, in order to achieve a higher density, manyexperimental research on increasing B has been done, which would facilitate a wider rangeof basic and application studies. However, the complication of plasma diagnosis makesdifficult to realize the mechanism of HWP in high magnetic flied. Therefore, it’s necessaryto study HWP by simulation.This paper investigates helicon discharge produced by dual spiral antennas in seriesusing COMSOL Multiphysics, a finite elements simulation tool developed by Cntech. Inour simulation, a axisymmetric two-dimensional plasma reactor model was developed bycoupling plasma model and ACDC model contained in the software. The electron density,electron temperature and power loss density varied by magnetic field, pressure and inputpower were also discussed.The results show that the electron density jump will occur when the magnetic fieldstrength B increase at the range of0.2T to0.3T and the coming range0.5-0.6T,0.8T-1.0T,which is because of the existence of t the resonance of the antenna and helicon waves. Andthe power loss density shows the same feature. It’s also found that the electron densityjump occurs vary with the input power when the magnetic field strength B=0.25T, whiledoesn’t occur when the magnetic field strength B is increase to1T.