Resonance Characteristics Research Of Micro-ring Resonators

Moore’s law proves that the microprocessor will contain nearly 5 billion transistors until2015. And along with the rapid development of internet communication, based on thetraditional way of the wire interconnection system has been hard to catch up with the steps.The distance, speed, power consumption and other factors is the challenges between circuitboard and chip for connection wire.So using optical interconnection instead of electricityinterconnection is a kind of inevitable trend, and optical solution must be cost-effiency if it isto be applied to the mass market.In these contexts, the ring resonators cavity structure based on insulator siliconsilicon-on-insulator (SOI) more and more get the attention of scholars at home and abroad.Due to the ability to utilize existing CMOS fabrication facilities, silicon photonic devices canbe integrated in the chip. So that, this structure has the incomparable advantage forapplications ranging from the photoelectric integration and optical interconnectionUnder the guidance of the latest achievements in the current international, aiming tomilitary and civilian needs, some research around micro-ring cavities have been done in thispaper. The main works are as follows.(1) In this thesis, we first introduce the principle of microring resonator and analysis theirtransmission property;(2) The ring resonator structure and vertical grating coupling system is simulated by Opticalnumerical simulation software(BPM、FDTD);(3) With the help of Cooperation Unit about micro-machining line（EBL, ICP, etc）, theabove-mentioned optimized design of micro-ring resonator was realized;(4) Morphology was tested to compare the designing and the physical parameters. Accordingto the two coupling scheme, the appropriated test system has been set up respectively anda good test results is obtained. (Micro-ring resonator has a quality factor about 104and thebistable phenomenon is observed) Lay a good foundation for the research on opticalwaveguide ring resonators devices;(5) On the basis of the test results, a kind of all-optical logic gate has been designed based onthe nonlinear effects of ring resonator.