Research Of MOEMS Accelerometer Based On SOI Micro-ring Resonator

As a sensitive device to acceleration, accelerometers have important applications in vibration sensing, impact detection, earthquake monitoring, inertial navigation, guidance system and other testing fields. With the rapid development of MEMS\NEMS technology, there is a higher precision requirement for accelerometer, including ultra-sensitive and rapid detection, and microoptoelectromechanical system (MOEMS) technology has been a surge in the research of various types of sensors based on optical effect. A novel acceleration detecting method was designed using optical properties of micro structure based on micro-ring resonator. Such a new accelerometer is the most promising method for its high precision, compact and other unmatched advantages.In this paper, a novel MOEMS acceleration based on a waveguide micro ring resonator on a flexible cantilever is propose and demonstrate, and this device is fabricated on a SOI wafer. Aiming to high precision acceleration, some research around micro cavities have been done in this paper. The main works are as follows. The structure of micro-ring resonator accelerometer was designed, and the relationship between the optical ring resonator and the sensitivity was analyzed. Based on finite difference time domain method (FDTD), optical properties simulation was carried out, and optimized structure of the ring resonator was obtained. Based on finite element analysis method(ANSYS), mechanical behavior of the cantilever was simulated by the static and modal analysis, and optimized structure of the cantilever was obtained.With the help of cooperation unit, the micro-ring resonator and vertical coupling gratings were fabricated. The testing system of micro-ring resonator has been set up through different experimental methods. As a high-efficiency single-cone coupling component, tapered fiber was used between external optical signal and the ring resonator-chip. The experimental result shows that: the designed micro-ring resonator has a quality factor about 103, and the measured sensitivity of 38pm/g is in accordance with our calculation. This sensitivity can be further improved by increasing the Q factor of resonator, which can be achieved by optimizing the optical and geometrical parameters of the resonator.