The Coupled-resonator-induced Transparency Based On Cascaded Double-ring Resonators In SOI

With the development of the silicon-based optoelectronics, it becomes more and more attractive using the optical signal instead the electrical signal to be the carrier of information. The silicon based optoelectronic devices have the unique advantage on the transmission, control and processing of the light and many other application of optical physical properties, so that it has become the research of hot topic in recent academic world both domestic and overseas. The micro ring resonator based on silicon on insulator has many advantages such as the micro size, the stable system, the low interference degree and the high quality factor that it has become the basic and important component of the silicon-based optoelectronic devices and it can be used in many fields. Nowadays an effect likes the Electromagnetically Induced Transparency generated in the optical resonators has become the research hotspot. And most of the research on the effect are usually focus on the optical resonators such as the microsphere, microdisk and the fiber resonators, but there only a few research on the effect that based on the micro ring resonator based on silicon.In this article, we firstly analyzed the realization condition of the coupled resonator induced transparency. Then we designed and fabricated the micro ring resonators on the SOI with the high accuracy electron beam lithography and the Inductively coupled plasma etching and other fabricate process. Then we utilized the vertical coupling grating to joint the fiber and the SOI chip. And at last we observed the coupled resonator induced transparency curve on the double ring resonators and we also analyzed the influence of the space between the two ring to the coupled resonator induced transparency curve. In this fabrication we obtained a Q factor of5.1X104, and the transparent peak of the CRIT curve is about500MHz.