Research On The Control Technology Of The Dicing Saw's Stage Of The Precise Positioning

With the development of semiconductor technology, integrated circuits become the basis of the information industry. Dicing saw is an important process of the IC after package, its processing capacity determine the quality and quantity of chips. With the increasingly thin silicon wafers and the smaller of the incision's width, chips also put forward the high requirements to the processing equipment. The good performance of the machinery and equipment can improve the yield of the chips on the wafer. Dicing machine at home and abroad is not deep enough, so researching on the dicing machine is important to improve the quality and yield of the chip.For dicing saw's problems:the direction of this thesis is the high-precision positioning and control technology. High-precision positioning and control technology are studied from two aspects. For high-precision positioning, stage of the dicing saw is the object of study,since the linear motor is compared to the traditional institutions to simplify the mechanical structure, the advantages have high stiffness and high reliability; while the linear motor is selected as the drive of the table movement and constitutes a dicing saw's precision motion stage; the PID control technology is selected to receive the control requirements of the feed system, and then work out the technical specifications of the dicing saw's stage.In this thesis, the required components of the air-bearing stage control system are selected and various components are calculated and selected. Then the physical and mathematical model of the linear motor and the stage are established. The quality of the controlled object on the stage is identified. PID control technology is used to design the current loop, velocity loop and position loop and establish the control block diagram of the system. The parameters of the PID have a great influence in the control system, in order to get the fast system response speed and small overshoot. PID control parameters are tuned based on the genetic algorithms to get the optimal parameter setting value. The control system is simulated in MATLAB and added speed feedback and acceleration feedback to analyze the influence of parameters on the system. The parameters are applied to the experiments, the experiments results show that, due to various factors, the theoretical values and experimental values still have the differences.