DC Magnetron Sputtering Power-supply With Limited Double-polarity Parallel Reseach

In industrial applications, the power of the magnetron sputtering supply requirements are increasing. To meet the diverse needs, we propose to use single-module supply to increase power like the superposition of building block method. The single module power with limited bipolar control mode to reduce switching losses. In the multi-module parallel adopt the chip of UC3907 to sharing current in power modules .Those methd ensure single module power supply to safe, reliable work.Taking into account the used parameters of power electronic devices and the basic requirements of magnetron sputtering power supply, single power supply module is given a target and the system parameters. On the basis of several commonly FB-bridge converter control mode of used in the manner described, select a limited bipolar control mode to achieve a single switch module power supply soft switching. In the same time also detailed analysis the process of the power modules to achieve soft switching in FB-bridge converter and some of the major components during the process to selection in FB-bridge converter. According to the circuit drive requirements, design a strong IGBT driver circuit. This circuit can ensure drive requirements together with high-reliability, signal transmission without delay and so on virtues.This article also gives some problems and solutions encountered in debugging single module power supply. On this basis, give the soft-switching of the waveforms . The actual correlation experiments show that the actual waveform and the theoretical analysis of the waveform can be a good fit, in the meantime show that the single module supply can implement soft switching in a wide load range.