Design Of 40kW Mid-frequency Pulse Magnetron Sputtering Power Souce

With continuous development of production,and technology,more and more higher quality of coating production is required.The production is badly needed.It requires that the coating equipments have higher precision,better stability,higher efficiency and quality.As an important branch of the coating technologies,Magnetron Sputtering is also being developed.It can be classified into DC Magnetron Sputtering,Unbalanced Magnetron Sputtering,RF Magnetron Sputtering and Pulse Magnetron Sputtering,etc. Because the Pulse Magnetron Sputtering has a higher efficiency in the process of coating and sputtering,it becomes popular in the field of the Magnetron Sputtering.Pulse Magnetron Sputtering Power Source is the most important equipment in the Magnetron Sputtering process.According to the studies of experiment and testing correlative,Pulse Magnetron Sputtering Power Source can do well in the frequency between 10kHz to 200kHz.Since high frequency can cause high switching losses,Soft switching technology will be applied to reduce the switching losses.The major task of the paper is to design a 20kW Mid-frequency Pulse Magnetron Sputtering Power Source based on Soft Switching technology.Phase shifted control will be applied in the source to implement ZVS.It will reduce the Switching losses and enhance the efficiency of the source.By using 20kHz switching frequency,the soure has a good performance on arc extinguishing.The output overcurrent protective value can be changed by manual,and it can achieve overcurrent protection less than 1μs,when source get rid of the fault automatically,it can recover by itself.The protection of the power source becomes reliable and prefect by using Multi-stage protecting fuctions.During the designation of the source,EMC and reliability is considered as much as possible.Because of the effort we had paid,the reliability and working life of the source are improved.The source based on digital designation,it has two control mode:local contol and remote control.Local control can realize the functions of display of the current,voltage and duty cycle.Firstly,the constitution and principle of the system is introduced in the paper. Secondly,implementation of hardware and software are discussed.At last,experimental results of the power source are shown and analysed,including voltage waveform and efficiency.