Research Of Several Key Techniques About Magnetron Sputtering Power Supply

During Magnetron Sputter technology the load was regarded as "plasma", plasma characteristic has a close relationship with improving quality of output of power system. The paper established equivalent circuit of magnetron sputtering plasma, made a summary of influence between plasma characteristic and Magnetron Sputter technology or power system, concluded computational method of parameter in the module.The paper also designed start-up module with Boost regulator and start-up strategy to resolve the problem of high start-up voltage, designed freewheeling module to restrain concussion of output waveform, designed main topology of dual-output magnetron sputtering pulse power supply to suit to double-target technology, analyzed Phase-shifted Full Bridge ZVS PWM DC/DC converter, achieved zero-voltage switching in wide range of load regulation.The paper simulated power system with PSPICE and SIMULINK and implemented prototype, the novel topology was proved to improve the output, include high voltage start-up, regulation of output and ZVS. The Magnetron Sputter pulse power supply was proved to suit to the actual process and increased efficiency of the whole system.