X-band Five Mems Distributed Phase Shifters

Microwave phase shifter can shift the phase of electromagnetic wave, it is widely applied in electronic communication system, and further, it is the key module of phased array antenna, synthetic aperture radar, radar electronic countermeasure, satellite communication and transceiver. Thus phase shifter with high capability plays an important role in the systems above. The significant challenge in designing conventional phase shifter is minimizing size and loss while preserving best phase precision, which is more obvious and urgent as the communication technology evolves enormously lately. However, MEMS phase shifter, a hot research field, overcomes these disadvantages due to some excellent capabilities, such as high quality factor, low loss and high isolation.Based on the analysis above, this thesis chooses the basis element of phase shifter as the research subject and gives a deep analysis on the electromagnetic and electrostatic-mechanical performance. The main content can be concluded as follows:1. The microstructures and properties of MEMS phase shifter are investigated in details.2. The working principle of X-band MEMS distributed phase shifter is discussed.3. The basis switch element composing X-band MEMS distributed phase shifter is fully studied and optimized.4. X-band MEMS distributed phase shifter is designed and simulated from aspects of electromagnetic and electrostatic-mechanical.