Distributed MEMS Phase Shifter Optimization And Analysis

Phase shifters are widely used in phased array radar, electronic warfare, communications and other microwave fields. The phase shifter on the performance plays an important role in the entire system. The conventional phase shifter has a large size, high power consumption, high cost disadvantage, unable to meet the rapid development of electronic communication systems. The MEMS phase shifter with a high quality factor, high isolation, low cost, low loss, ease of integration, etc., is a hot research direction at home and abroad now.This thesis takes the distributed MEMS phase shifter as the main study object. Based on our thoroughly analysis of the MEMS phase shifter units which are MEMS switches, the thesis achieves an optimal MEMS phase shifter design solution. Electromagnetic simulation and failure mechanisms analysis of MEMS switches results show the correctness and efficiency. The main contents include:1. Introduction of the development status of each type of MEMS phase shifters,2. Discussion of the operation of the distributed MEMS phase shifter, and the main parameters which affect the distributed MEMS phase shifters,3. Simulation analysis of the MEMS switch circuit model and the distributed MEMS phase shifter Bragg frequency,4. Analysis of the parameters which affect the pull down voltage of the MEMS switches, the simulation of the MEMS switches, and the design of a five bits phase shifter,5. Analysis of the MEMS phase shifter failure mechanisms.