New Thin-film Defects In The Study Of Microscopic Detection

With the development of laser technique, anti-laser-damage films become more and more important and popular in the world. And the miro-defect detection technique becomes more and more important.Imaging technique, interferometric method and ellipsometry are used in the defect detection of the thin film. In this thesis, we study general method of the defect detection nowadays, and invent a novel defect detection systerm to detect the defection on the surface and subsurface of the film. We also do embedded research in both theoretics and experiment.In this thesis, we do the researches on the defect detection of the optical thin film and optical sufaces have been investigated in the thesis. An imaging ellipsometer combined with confocal microscopy has been proposed.The theoretical analysis and the experimental work have been done to detect the different kinds of defection on the surface and subsurface on the different samples. We can find that the experiment and the simulation match well, which shows that the measure has high reliability and veracity. Through image and data analysis, we can differentiate the defect on the surface and the subsurface of the film, and get the information of the position, the figure and the refractive index of the defect.Besides, we develop the system, and propose the parallel measure to realize the fast and real-time measurement on the surface and subsurface of the film.The research work of this thesis gives a new path to detect the micro-defect of the film, and establish the base of the application and the industrialization of the real-time measure system...