Tiny Laser Micromachining Regional Temperature Distribution Of The Homogenization Method

The fabrication of monolithic opto-electronic integrated circuits(MOEICs) involves opto-electronic technology and micro-electronic technology. The MOEICs have the advantages of high performance, high reliability, small size and cost-effective, and so, much attention has been paid to it. Because of the advantages of"low temperature processing"and"directing writing", laser assisted micro-processing of semiconductor can be used to integrate the opto-electronic components and electronic components onto one chip, and it has a broad potential application in device fabrication.The key of this technology is to solve the problem of how to control the temperature distribution, which will affect the performances of the devices. Temperature uniformity in the laser exposed area has been seldom reported. It's a significant work to research how to uniform the temperature distribution in the processed area. The purpose of this thesis is to develop the methods of temperature uniformity for laser assisted micro-processing of semiconductor. Three methods have been proposed to uniform the temperature distribution in the small processd region. The main contents and contributions include:(1) It has been proposed to uniform the temperature distribution through space modulating the intensity incident on the surface of substrate using a maskThe emphasis of this method is to find the laser intensity distribution that can realize the temperature uniformity. The results show that when the mean temperature rise in the processed area is 500 K, the maximum temperature difference is 3.5 K, which can meet the accurancy requirement of temperature uniformity.(2) The means of converting laser intensity distribution at the focal plane using binary optical element(BOE ) has been proposedThe main task is to design binary optical element having proper phase construction. The expected intensity distribution has been calculated firstly, then the corresponding phase construction of BOE has been done, too. And the genetic algorithm has been proposed to design the BOE. The results suggest that this method can uniform the temperature distribution in the exposed area better.(3) Another method using liquid crystal spatial light modulator can control the small region of incident laser, which can change the intensity distribution and uniform temperature distribution. The related driver circuit of liquid crystal spatial light...