Developed And Its Characteristics Of Mems-based Micro-drive

According to the principle of micropump with passive valve, this paper provides a new type of microactuator with V-microvalve, which is based on MEMS technology. Carrying out the technical simulation of the making and properties of microvalve, PZT composite thin plates which are the components of microactuator, designing the related fabrication process and scale of mask, then succeeding in operating this microactuator. With the theoretical analysis, it advances the relationship between the applied voltage and displace of square PZT composite thin plates, the relationship between thickness and displace of composite thin plates, also the relationship between thickness and inherent frequency of composite thin plates, Which providing reference for further comparing and analysing the theory and experiment of MEMS devices with square silicon cup. During the process, we find out that the crucial factor of designing and fabricating V-microvalve is the relationship between the technology of anisotropic etching of silicon and the structural measurements. This paper also provides the properties of this new type of microactuator with V-microvalve, such as flux, backward pressure and so on. The microactuator has the advantages of simple technology, low cost, small volume. especially on biomedical field.