Analysis And Design On The Actuator Structure Of Micropump With Piezoelectric Actuator

Based on the working principle of micropump with piezoelectric actuator device, aelectromechanical coupled mechanics model'for the piezoelectric composite laminatesof micropump actuator is established in this paper. By application the elastic thin platebending theory with small displacement some elastic bending surface differentialequations for piezoelectric composite laminates with common shape and round shapeare derived. At one time a new method on some transverse loads on piezoelectriccomposite laminates being equivalent to piezoelectric laminate lengthwise straininduced by inverse piezoelectric effect is presented for helping us to solve the similarproblems in future. When calculating the equivalent transverse loads, the edge electricfield distribution of parallel plate capacitor is studied deeply in this paper. In order toobtain the numerical values of super equation, a finite element structure model formicropump actuator is developed. Then a statics analysis on the model is processed bycomputer. the obtained results show a good agreement. Finally, some part optimizationsfor micropump actuator are made, which dramatically enhances its workingperformance. In this way, some optimization methods for designing micropump actuatorare advanced in this paper and the obtained optimization parameters can satisfy manydifferent applications to a certain extent.