Research On Correlation Performance Of High Frequency MEMS Resonator Array

The rapid development of modern wireless communication technology makes the radio spectrum resources scarce,so for the communication equipment has more stringent requirements.At present,the research on passive filters with easy processing,light weight,small size,low cost,high quality factor and easy integration has also become a hot spot in the field of microwave technology.With the rapid development of MEMS technology,the parameters such as resonant frequency,motion resistance,power handling capability and so on have been able to meet the technical requirements of wireless communications.At the same time,research shows that the coupling resonator array is beneficial to reduce the motion resistance and improve the power processing capability.Accordingly,the main contents of this dissertation include:Firstly,the influence of the arrangement of the MEMS resonator array and the distribution of the coupling beam on the performance of MEMS resonator array is analyzed.It is found that the layout of the resonator array does not affect the resonant frequency,and the number of coupling beams in the array will have a linear effect on the resonant frequency.So the influence of the number of the disk resonators on the MEMS resonator array continues to be simulated and analyzed.The results show that when the single disk resonator is coupled into a dual disc-coupled resonator array,the overall resonance frequency of the array generates a large offset of 231.9ppm.For a disc-coupled resonator array,the more disk resonators on the MEMS resonator array,the increase or decrease of the single disk resonator is less to the overall resonant frequency of the coupled array.That is to say,for the MEMS resonator array,with the increase of disk resonators,the change of single disk resonators number will have less influence on the overall resonant frequency of coupled arrays.Secondly,considering the size change of the coupling beam will affect the resonator array structure,which will cause the resonant frequency change.Therefore,the influence of the width of the coupling beam on the resonant frequency is simulated and analyzed.The results show that when the width of the coupling beam increases 0.1?m,the resonant frequency generates a offset of 11.6ppm.When the width of the coupling beam increases from 1?m to 3?m,the resonant frequency of the double disk coupled resonator generates a large offset of 236.8ppm.Then a high frequency array coupled resonator with resonant frequency of 99.51 MHz and resistance of 1.3k? was designed,and designed with simpler micromachining technology based on a cavity-SOI wafer.According to the design flow of MEMS device,the structure layout and process flow are designed,which proves that it is technically feasible.Finally,the influence of the coupling beam inclination caused by fabrication error on disk resonator-based filter is analyzed in this paper.The performance parameters of the resonator-based filter under different inclination angle of the coupling beam are theoretically analyzed and simulated by ANSYS.Through the comparison between theoretical derivation and simulation results,the reliability of the results is verified.The results show that the center frequency varies 10 ppm,24ppm and 51 ppm respectively,when the inclination angle reaches 0.1 °,0.2 ° and 0.5 ° respectively.And when the inclination angle reaches 0.5 °,the fractional band-width deviation will reach 5.6%.According to this paper,a resonator-based filter coupled by semi-high-type coupling beam is proposed,which is 4× better than conventional disk resonator-based filter with regard to stability.