| Micro Electro-Mechanical System (MEMS) is a promising subject, and it is expected to have a huge market in the future. Because the design process of MEMS is different from the conventional manufacturing process, a kind of software named MEMS CAD is becoming a necessary for the MEMS design. As one part of the software, the material database is important to the design, manufacturing and simulation of MEMS, also it is a guarantee for the standardization of MEMS products. The design and development of MEMS material database provide a lot of theoretical and applied value for the industrialization of MEMS products.Firstly, in view of the structured design means of MEMS, on the level of system, demonstrating the necessity of MEMS CAD in MEMS design. Comparing with other software, analyses the importance of material database used to the integrated analyze, process and simulation, product testing and some other phases.Secondly, considering the semi-structured characteristic of MEMS material data and the self-described of XML, takes XML as the main means to describe the document structure and saves these documents as the based data of the database. In order to satisfy the requirement of the integrated design platform, the database takes a three-layer structure which consists with the user interface , data operating and the based documents , at the same time, uses Tcl as the data operating language and Tk to develop the user interface.Finally, some base functions come to realize such as addition of the data, modification, deletion and so on, also integrates the database with MEMS GARDEN3. 0. It has about one hundred materials. All of them are classified depending on the process into film or bulk and many familiarmaterials such as SiO2, Si, SiN are involved in it. What is more important is that every newsreel includes the data value, process condition, the data source, so it will destine to provide a lot of convenience for MEMS design and also will be a useful reference handbook for design person. |
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