Study On Measurement Methods Of MEMS Micro-Structures In-Plane Motion

Micro-Electro Mechanical System (MEMS) is composed of electric and machine components. Testing technique becomes the important procession of MEMS design, simulation, production, quality control and performance estimation. In-plane motion test is the most important port of MEMS motion test. High resolving power of in-plane motion test is the foundation of MEMS three-dimensional motion measurement, and is significant to material characteristic and mechenics parameter measurement. This dissertation researches on in-plane micro-motion measurement with nanometer resolution for MEMS based on compute vision technology. The research's main work is as following:1. Domestic/foreign in-plane dynamic testing techniques of MEMS are systematically investigated and analyzed in the application field, current status and development trends of Micro- electro mechanical system. MEMS in-plane dynamic testing method is set up which combined rigid displacement test, local deformation measurement and rotation meterage technique.2. MEMS motion edge detection algorithm is brought forward, combined with blur image enhance, fractal interpolation and wavelet expectation sub-pixel location technique. Extracting MEMS max motion scope accurately is realized through it. In the condition of continue lighting, MEMS in-plane motion range are obtained using the algorithm based on blur image. With fractal interpolation method, the edge of blur image is reconstructed. The accurate edge is detected by wavelet transformation technology. The measurement repetition is improved.3. MEMS two-dimension rigid motion estimation algorithm is brought forward based on two algorithms of block matching Ultimate-root and phase correlation surface fitting sub-pixel resolving power technique. Estimating MEMS in-plane motion quickly and accurately is realized through time space and frequency space measurement algorithms analysis. The error caused by variant illumination is reduced.4. According to the theory of invariability of center of mass of a fixed region, an improved rotation measurement method is demonstrated with better calculation precision. Given the insulation structures of MEMS which are left behind fabrication, we get several regions which have unattached object and smooth background. The rotate angel can be obtained with high resolution by observing the changes about center of mass of given regions.5. On the base of the surface fitting sub-pixel location technique and the Newton-Raphson iterative method, extraction of the MEMS deformation information is proposed. Take deep research on the initial-value problem in correlation calculation. The displacement calculated from phase correlation and digital differential coefficients are combined as the initial value of Newton-Raphson iterative method. The convergence speed and the precision are improved greatly.6. A new method is proposed to extract complex micro-structure three-dimensional information from sequence interferogram based on phase-shifting microscopic interferometry and growth algorithm to measure of. It can extract the bright image from a sequence of interference image. With the block match and phase correlation algorithum, in-plane motion character can be acquired.