Using Mems Technology To Produce Silicon Magnetic Transistor Research

This subject is a research about manufacturing silicon magnetic-transistor with rectangle-plank cubic construction on silicon surface by MEMS technology, meanwhile it also makes a experiment-research on characteristic of silicon magnetic-transistor manufacturedExperiment expresses that silicon magnetic-transistor with rectangle plank cubic construction which is made by MEMS technology owns many virtues, which are as follows: First, stronger V-I characteristic curves and higher magnetic sensitivity (collector current magnetic sensitivity of sample can achieve to 227%/T), Second, lower negative-temperature coefficient that is small. Third, characteristic of Ic-Ib is very well.The result of experiment proves that the design and manufacture project for silicon magnetic- transistor is feasible completely, Specially, in the course of manufacturing magnetic-transistor technique, anisotropic etching is applied and reliable technique project is provided in order to manufacturing silicon magnetic-transistor with rectangle-plank cubic construction, These technologies can be compatible to IC technology, integrated easily and there is a wide application field. In the thesis, negative resistance character curves of magnetic-transistor has been analyzed simply and discussed so that ideal design project has been presented to further enhance magnetic-transistor magnetic sensitivity.The thesis consists of six chapters.The first chapter: Generalizing the development situation of magnetic devicesThe second chapter: Discussing MEMS and its basic situation, which is one of the most techniques in this century.The third chapter: Discussing basic construction, operating fundamental and basic character.The forth chapter: Design of basic construction, operating fundamental and manufacture technology for silicon magnetic-transistor by MEMS. The fifth chapter: The result of experiment The sixth chapter: Discussion and conclusion...