The Detecting Equipment Of The Laser Scratching And Testing Research

Bonding strength of the interface of film-substrate is an important factor and key problem that influence the reliability and usage of film-substrate system. Now, there are more than 355 methods have been come out about the detecting bonding strength of the interface of film-substrate, which include the laser spallation technique, the laser scratching technique, the indentation technique, the interface indentation technique et al...these methods all have no-solved problems both in the theoretics and in the detecting technique, people haven't raveled the determinate relation about the critical point and the bonding strength of the interface of film and haven't found the detecting technique of the bonding strength of the interface which is right to all conditions. It is still a diffcult problem around the world that directly detecting the bonding strength of the interface in the fixed quatity. On the basic analyzing about various detecting techniques of the film strength , our school teachers put forward a new concept firstly about integrating the laser and scratching technique and have systemic studies in order to discover new method applied in the field of film.In this paper, various detecting methods of film strength and the principle of the laser scratching have been studied, the technical characteristic of the laser scratching technique has been shown compared with other methods. According to the requirements of the detecting system of laser scratching(DSLS), a structure of DSLS has been presented. DSLS is included by six parts, which are computer, laser, power detecting instrument, two-axle parallel motion table, infrared thermal imaging apparatus and CCD camera. Among them, computer is brain, it is main controller, laser controls the power, power detecting instrument receives reflecting laser from the white light laser which irradiates the film, two-axle parallel motion table which carries film controls the speed and track of the motors, infrared thermal imaging apparatus records the temperature of the scratching film, CCD camera records the imagings of the scratching film. DSLS is divided into two parts to control, one is computer ,which is main controller, the others are controlled by computer. Software is developed by Microsoft Visual C++ 6.0, computer exchanges information with other parts through RS-232 or PCI and inspects the whole system,sends orders and sets parameters, the other parts receive,execute oders, and at the same time feedback the condition of system to computer.