Laser Chip Infrared Nondestructive Testing Method Based On Active And Passive Infrared Image Fusion

The laser industry based on semiconductor laser chips has been widely used in medical,commercial,scientific,information and military fields.The performance of laser chips directly affects all aspects of society.However,in the process of laser chip production,after a series of processes,defects will inevitably occur.Defect detection of laser chips is particularly important for improving the process,analyzing the cause of defects,and improving the performance of lasers.This paper applies infrared non-destructive testing technology to laser chip defect detection,and studies image fusion technology.The main research contents of the paper are as follows:Aiming at the shortcoming of the traditional infrared non-destructive testing method is to inject heat flow to the surface of the measured object through the thermal excitation source,which is easy to cause damage to the laser chip,this paper proposes a new method for infrared non-destructive testing of laser chips based on active and passive infrared detection methods.The passive infrared detection method is to use an infrared light source to irradiate the laser chip during the detection,and the laser chip reflects the infrared light emitted by the infrared light source,so as to infrared image the defects near the surface layer of the chip through the infrared detector.The active infrared detection method uses a long probe to apply a weak current to the positive and negative electrodes of the chip,and the infrared detector can clearly image the defects in the active area of the chip.In this paper,a laser chip defect infrared detection system is built.The overall design of the infrared detection system,the selection of infrared light sources,the selection of infrared focal plane arrays,and the construction of an infrared detection system are studied in depth.Four kinds of image fusion algorithms based on pyramid transformation were used to fuse the active and passive infrared images collected by active and passive infrared detection methods.Through experimental comparison and analysis,it is determined that when the number of decomposition layers is 4,and the top layer adopts the fusion rule of weighted average,and the other layers adopt the fusion rule of the absolute value based on contrast pyramid transformation method to fuse the active and passive infrared images,the fusion effect is relatively best.The fused image contains rich defect information,which shows the effectiveness of the laser chip infrared non-destructive detection method based on active and passive infrared image fusion.