Opengl-based Mems Process Geometry Simulation Technology Research

As a key technology of MEMS CAD, MEMS process geometric simulation from process and layout is a requirement of top-down design and bottom-up verification in the MEMS integrated design platform. The rationality of process and layout design can be checked up, and the simulation's output transformed into model file can be imported into device level to actualize the device's capability analysis. Therefore, the research of process geometric simulation has great values both on theory and practice.Firstly, according to the layout file, the process geometric modeling and the process file, the flow of the system design were put forward, on the basis of what the data structure of input files and system were framed. Secondly, some foundational arithmetic such as the division of concave polygon, the polygon's boolean operation, the transform from circle to polygon, the pick-up of model top surface were designed particularly based on OpenGL. The corresponding process simulation arithmetic were realized in view of the process modeling designed above. Finally, on the basis of the research of SAT file, the simulation's result - solid model was transformed into solid file which could be imported into ANSYS to actualize the device's capability analysis.The typical device - micro gyroscope was taken as an example in this paper to validate the feasibility and rationality of the system, and the final result proved the validity of the system.The MEMS process geometric simulation founded in this paper can effectively enhance the efficiency of MEMS device facture, and it also lays a good foundation for the development of MEMS CAD.